Insight into high temperature performance of magnetron sputtered Si-Ta-C-(N) coatings with an ion-implanted interlayer

Applied Surface Science

Bondarev, A. V.; Antonyuk, M. N.; Kiryukhantsev-Korneev, Ph V.; Polcar, T.; Shtansky, D. V., 2021: Insight into high temperature performance of magnetron sputtered Si-Ta-C-(N) coatings with an ion-implanted interlayer. APPLIED SURFACE SCIENCE 541, doi: 10.1016/j.apsusc.2020.148526; FULL TEXT
(VERIOS, HELIOS, KRATOS-XPS, NANOINDENTER)

Equipment:

• High resolution Scanning Electron Microscope FEI Verios 460L (VERIOS)
• Focused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 660 (HELIOS)
• X-ray Photoelectron Spectroscopy Axis Supra (KRATOS-XPS)
• Hysitron TI 950 (NANOINDENTER)

Research Groups:

• CF: CEITEC Nano