Dielectric properties of nanostructured mixed-oxide films formed by anodizing Al/Zr bilayers

12th International Conference on Nanomaterials - Research and Application (NANOCON)

SEPÚLVEDA SEPÚLVEDA, L.; KAMNEV, K.; MOZALEV, A., 2021: Dielectric properties of nanostructured mixed-oxide films formed by anodizing Al/Zr bilayers. 12TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH AND APPLICATION (NANOCON) , p. 44 - 6, doi: 10.37904/nanocon.2020.3693; FULL TEXT
(MAGNETRON, VERIOS)

Equipment:

• Magnetron sputtering system BESTEC (MAGNETRON)
• High resolution Scanning Electron Microscope FEI Verios 460L (VERIOS)

Research Groups:

• CF: CEITEC Nano