Preparation of high-quality stress-free (001) aluminum nitride thin film using a dual kaufman ion-beam source setup

THIN SOLID FILMS

GABLECH, I.; SVATOŠ, V.; CAHA, O.; DUBROKA, A.; PEKÁREK, J.; KLEMPA, J.; NEUŽIL, P.; SCHNEIDER, M.; ŠIKOLA, T., 2019: Preparation of high-quality stress-free (001) aluminum nitride thin film using a dual kaufman ion-beam source setup. THIN SOLID FILMS 670, p. 105 - 8, doi: 10.1016/j.tsf.2018.12.035; FULL TEXT
(KAUFMAN, RIGAKU9, WOOLLAM-VIS, ICON-SPM)

Equipment:

• Ion-Beam Sputter Deposition System BESTEC (KAUFMAN)
• X-ray diffractometer with high brightness source Rigaku SmartLab 9kW (RIGAKU9)
• NIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE (WOOLLAM-VIS)
• Scanning Probe Microscope Bruker Dimension Icon (ICON-SPM)

Research Groups:

• Fabrication and Characterisation of Nanostructures
• CF: CEITEC Nano

CEITEC authors:

• Prof. Pavel Neužil
• Prof. Tomáš Šikola
• Ondřej Caha, Ph.D.
• Jaroslav Klempa
• Adam Dubroka, Ph.D.
• Imrich Gablech, Ph.D.