Dielectric metasurfaces as modern optical components

Master´s thesis

Rovenská, K., 2020: Dielectric metasurfaces as modern optical components. MASTER´S THESIS , p. 1 - 57
(MAGNETRON, DEKTAK, KRATOS-XPS, MIRA-EBL, EVAPORATOR, VERIOS, RIE-FLUORINE, ALD)

Equipment:

• Magnetron sputtering system BESTEC (MAGNETRON)
• Mechanical profilometer Bruker Dektak XT (DEKTAK)
• X-ray Photoelectron Spectroscopy Axis Supra (KRATOS-XPS)
• Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS (MIRA-EBL)
• Electron beam evaporator BESTEC (EVAPORATOR)
• High resolution Scanning Electron Microscope FEI Verios 460L (VERIOS)
• RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80 (RIE-FLUORINE)
• Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200 (ALD)

Research Groups:

• CF: CEITEC Nano
• Fabrication and Characterisation of Nanostructures

CEITEC authors:

• Katarína Rovenská