Fabrication and testing of microbolometer or other infrared detector based on plasmonic antennas

Bachelor´s thesis

Děcký, M., 2022: Fabrication and testing of microbolometer or other infrared detector based on plasmonic antennas. BACHELOR´S THESIS , p. 1 - 44; FULL TEXT
(LYRA, MIRA-EBL, EVAPORATOR, DWL, MPS150)

Equipment:

• Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 (LYRA)
• Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS (MIRA-EBL)
• Electron beam evaporator BESTEC (EVAPORATOR)
• UV Direct Write Laser system Heidelberg Instruments DWL 66-fs (DWL)
• 4-probe station Cascade Microtech MPS 150 (MPS150)

Research Groups:

• CF: CEITEC Nano