Structural color filters with compensated angle-dependent shifts

OPTICS EXPRESS

ROVENSKÁ, K.; LIGMAJER, F.; IDESOVÁ, B.; KEPIČ, P.; LIŠKA, J.; CHOCHOL, J.; ŠIKOLA, T., 2023: Structural color filters with compensated angle-dependent shifts. OPTICS EXPRESS 31(26), p. 43048 - 9, doi: 10.1364/OE.506069; FULL TEXT
(EVAPORATOR, MIRA-EBL, RIE-CHLORINE, ALD, SNOM-NANONICS, TUBE-FURNACE)

Equipment:

• Electron beam evaporator BESTEC (EVAPORATOR)
• Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS (MIRA-EBL)
• RIE by Chlorine Chemistry Oxford Instruments Plasma Technology PlasmaPro 100 (RIE-CHLORINE)
• Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200 (ALD)
• Scanning Near-field Optical Microscopy Nanonics Imaging MV 4000 (SNOM-NANONICS)
• CLASIC Tube Furnace (TUBE-FURNACE)

Research Groups:

• Fabrication and Characterisation of Nanostructures
• CF: CEITEC Nano

CEITEC authors:

• Katarína Rovenská
• Filip Ligmajer, Ph.D.
• Beáta Idesová
• Peter Kepič
• Jiří Liška, Ph.D.
• Prof. Tomáš Šikola