Influence of oxygen flow on the structure, chemical composition, and dielectric strength of AlxTayOz thin films deposited by pulsed-DC reactive magnetron sputtering

Surface and Coatings Technology

Drevet, R.; Souček, P.; Mareš, P.; Ondračka, P.; Fekete, M.; Dubau, M.; Vašina, P., 2025: Influence of oxygen flow on the structure, chemical composition, and dielectric strength of AlxTayOz thin films deposited by pulsed-DC reactive magnetron sputtering. SURFACE AND COATINGS TECHNOLOGY 498, p. 1 - 12, doi: 10.1016/j.surfcoat.2025.131865; FULL TEXT
(KRATOS-XPS)

Equipment:

• X-ray Photoelectron Spectroscopy Axis Supra (KRATOS-XPS)

Research Groups:

• CF: CEITEC Nano