Engineering of Active and Passive Loss in High-Quality-Factor Vanadium Dioxide-Based BIC Metasurfaces

AIGNER, A.; LIGMAJER, F.; ROVENSKÁ, K.; HOLOBRÁDEK, J.; IDESOVÁ, B.; MAIER, S.; TITTL, A.; MENEZES, L., 2024: . NANO LETTERS 24(35), p. 10742 - 8, doi: 10.1021/acs.nanolett.4c01703; FULL TEXT
(KAUFMAN, ALD-FIJI, EVAPORATOR)

Equipment:

• Ion-Beam Sputter Deposition System BESTEC (KAUFMAN)
• Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200 (ALD-FIJI)
• Electron beam evaporator BESTEC (EVAPORATOR)

Research Groups:

• Fabrication and Characterisation of Nanostructures
• CF: CEITEC Nano

CEITEC authors:

• Filip Ligmajer, Ph.D.
• Jakub Holobrádek
• Beáta Idesová