Engineering of Active and Passive Loss in High-Quality-Factor Vanadium Dioxide-Based BIC Metasurfaces
NANO LETTERS
AIGNER, A.; LIGMAJER, F.; ROVENSKÁ, K.; HOLOBRÁDEK, J.; IDESOVÁ, B.; MAIER, S.; TITTL, A.; MENEZES, L., 2024: Engineering of Active and Passive Loss in High-Quality-Factor Vanadium Dioxide-Based BIC Metasurfaces. NANO LETTERS 24(35), p. 10742 - 8, doi: 10.1021/acs.nanolett.4c01703; FULL TEXT
(KAUFMAN, ALD, EVAPORATOR)
Equipment:
- Ion-Beam Sputter Deposition System BESTEC (KAUFMAN)
- Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200 (ALD)
- Electron beam evaporator BESTEC (EVAPORATOR)
Research Groups:
CEITEC authors: