The planar anodic Al2O3-ZrO2 nanocomposite capacitor dielectrics for advanced passive device integration

SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS

KAMNEV, K.; PYTLÍČEK, Z.; BENDOVÁ, M.; PRÁŠEK, J.; GISPERT-GUIRADO, F.; LLOBET, E.; MOZALEV, A., 2023: The planar anodic Al2O3-ZrO2 nanocomposite capacitor dielectrics for advanced passive device integration. SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS 24(1), p. 1 - 17, doi: 10.1080/14686996.2022.2162324; FULL TEXT
(MAGNETRON, SUSS-MA8, SUSS-RCD8, VERIOS, KRATOS-XPS, MPS150)

Equipment:

• Magnetron sputtering system BESTEC (MAGNETRON)
• Mask Aligner, NanoImprint Lithography SÜSS MicroTec MA8/BA8 Gen3 (SUSS-MA8)
• Resist coating and development system SÜSS MicroTec RCD8 (SUSS-RCD8)
• High resolution Scanning Electron Microscope FEI Verios 460L (VERIOS)
• X-ray Photoelectron Spectroscopy Axis Supra (KRATOS-XPS)
• 4-probe station Cascade Microtech MPS 150 (MPS150)

Research Groups:

• CF: CEITEC Nano

CEITEC authors:

• Mária Bendová
• Jan Prášek, Ph.D.