Coupling of photovoltaics with neurostimulation electrodes-optical to electrolytic transduction

JOURNAL OF NEURAL ENGINEERING

JAKEŠOVÁ, M.; KUNOVSKÝ, O.; GABLECH, I.; KHODAGHOLY, D.; GELINAS, J.; GLOWACKI, E., 2024: Coupling of photovoltaics with neurostimulation electrodes-optical to electrolytic transduction. JOURNAL OF NEURAL ENGINEERING 21(4), doi: 10.1088/1741-2552/ad593d; FULL TEXT
(PARYLENE-SCS, MAGNETRON, SUSS-MA8, EVAPORATOR, RIE-FLUORINE, DIENER, WIRE-BONDER)

Equipment:

• SCS Parylene Deposition System (PARYLENE-SCS)
• Magnetron sputtering system BESTEC (MAGNETRON)
• Mask Aligner, NanoImprint Lithography SÜSS MicroTec MA8/BA8 Gen3 (SUSS-MA8)
• Electron beam evaporator BESTEC (EVAPORATOR)
• RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80 (RIE-FLUORINE)
• Resist stripper Diener electronic NANO Plasma cleaner (DIENER)
• Wire bonder TPT HB 16 (WIRE-BONDER)

Research Groups:

• Bioelectronics Materials and Devices
• CF: CEITEC Nano

CEITEC authors:

• Marie Jakešová, Ph.D.
• Prof. Eric Daniel Glowacki, Ph.D.