Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C2H6O and NO2

NANOTECHNOLOGY VIII

Chmela, O; Sadilek, J; Sama, J; Romano-Rodriguez, A; Hubalek, J; Vallejos, S, 2017: Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C2H6O and NO2. NANOTECHNOLOGY VIII 10248, doi: 10.1117/12.2265000
(RAITH, DWL, KAUFMAN, SCIA, RIE-FLUORINE, MAGNETRON, RIGAKU3)

Equipment:

• E-beam writer RAITH150 Two (RAITH)
• UV Direct Write Laser system Heidelberg Instruments DWL 66-fs (DWL)
• Ion-Beam Sputter Deposition System BESTEC (KAUFMAN)
• Ion beam etching Scia Systems Coat 200 (SCIA)
• RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80 (RIE-FLUORINE)
• Magnetron sputtering system BESTEC (MAGNETRON)
• X-ray powder diffractometer Rigaku SmartLab 3kW (RIGAKU3)

Research Groups:

• CF: CEITEC Nano
• Fabrication and Characterisation of Nanostructures

CEITEC authors:

• Prof. Jaromír Hubálek, Ph.D.