Mid-infrared ellipsometry, Raman and X-ray diffraction studies of AlxGa1-xN/AlN/Si structures

APPLIED SURFACE SCIENCE

Wang, CN; Caha, O; Munz, F; Kostelnik, P; Novak, T; Humlicek, J, 2017: Mid-infrared ellipsometry, Raman and X-ray diffraction studies of AlxGa1-xN/AlN/Si structures. APPLIED SURFACE SCIENCE 421, p. 859 - 865, doi: 10.1016/j.apsusc.2017.02.056
(WOOLLAM-MIR, RIGAKU9, TERS)

Equipment:

• MIR spectroscopic ellipsometer J. A. Woollam IR-VASE (WOOLLAM-MIR)
• X-ray diffractometer with high brightness source Rigaku SmartLab 9kW (RIGAKU9)
• Scanning Probe Microscope + microRaman + PhotoLuminiscence system NT-MDT Ntegra Spectra + Solar II (TERS)

Research Groups:

• CF: CEITEC Nano

CEITEC authors:

• Ondřej Caha, Ph.D.