Pulsed laser deposition of Sb₂S₃ films for phase-change tunable nanophotonics

NEW JOURNAL OF PHYSICS

KEPIČ, P.; LIŠKA, P.; IDESOVÁ, B.; CAHA, O.; LIGMAJER, F.; ŠIKOLA, T., 2024: Pulsed laser deposition of Sb₂S₃ films for phase-change tunable nanophotonics. NEW JOURNAL OF PHYSICS 26(1), p. 1 - 8, doi: 10.1088/1367-2630/ad1696; FULL TEXT
(ICON-SPM, KRATOS-XPS, LYRA, ALD, WITEC-RAMAN, RIGAKU9, WOOLLAM-VIS)

Equipment:

• PLD deposition system: UHV, in-situ RHEED, IR laser heating ()
• Scanning Probe Microscope Bruker Dimension Icon (ICON-SPM)
• X-ray Photoelectron Spectroscopy Axis Supra (KRATOS-XPS)
• Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 (LYRA)
• Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200 (ALD)
• Witec Alpha 300R (WITEC-RAMAN)
• X-ray diffractometer with high brightness source Rigaku SmartLab 9kW (RIGAKU9)
• NIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE (WOOLLAM-VIS)

Research Groups:

• Fabrication and Characterisation of Nanostructures
• CF: CEITEC Nano

CEITEC authors:

• Peter Kepič
• Petr Liška
• Beáta Idesová
• Ondřej Caha, Ph.D.
• Filip Ligmajer, Ph.D.
• Prof. Tomáš Šikola
• Ondřej Caha, Ph.D.