Ellipsometry of surface layers on a 1-kg sphere from natural silicon

APPLIED SURFACE SCIENCE

KLENOVSKÝ, P.; ZŮDA, J.; KLAPETEK, P.; HUMLÍČEK, J., 2017: Ellipsometry of surface layers on a 1-kg sphere from natural silicon. APPLIED SURFACE SCIENCE 421, p. 542 - 5, doi: 10.1016/j.apsusc.2016.08.135; FULL TEXT
(WOOLLAM-VIS)

Equipment:

• NIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE (WOOLLAM-VIS)

Research Groups:

• Development of Methods for Analysis and Measuring
• CF: CEITEC Nano

CEITEC authors:

• Petr Klapetek, Ph.D.