A practical guide to interpreting low energy ion scattering (LEIS) spectra

APPLIED SURFACE SCIENCE

PRŮŠA, S.; LINFORD, M.; VANÍČKOVÁ, E.; BÁBÍK, P.; PINDER, J. W:; ŠIKOLA, T.; BRONGERSMA, H., 2024: A practical guide to interpreting low energy ion scattering (LEIS) spectra. APPLIED SURFACE SCIENCE , doi: 10.1016/j.apsusc.2023.158793; FULL TEXT
(UHV-LEIS)

Equipment:

• Ultra High Vacuum Preparation and Analytical System - Low Energy Ion Spectroscopy ION-TOF Qtac 100 (UHV-LEIS)

Research Groups:

• Fabrication and Characterisation of Nanostructures
• CF: CEITEC Nano

CEITEC authors:

• Stanislav Průša, Ph.D.
• Elena Vaníčková
• Pavel Bábík
• Prof. Tomáš Šikola