Fabrication of graphene and study of its physical properties

Ph.D. Thesis

Procházka, P., 2018: Fabrication of graphene and study of its physical properties. PH.D. THESIS , p. 1 - 139
(ALD, DIENER, EVAPORATOR, MIRA-EBL, PECVD, TERS, WIRE-BONDER)

Equipment:

• Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200 (ALD)
• Resist stripper Diener electronic NANO Plasma cleaner (DIENER)
• Electron beam evaporator BESTEC (EVAPORATOR)
• Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS (MIRA-EBL)
• Plasma Enhanced CVD of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 100 (PECVD)
• Scanning Probe Microscope + microRaman + PhotoLuminiscence system NT-MDT Ntegra Spectra + Solar II (TERS)
• Wire bonder TPT HB 16 (WIRE-BONDER)

Research Groups:

• CF: CEITEC Nano
• Molecular Nanostructures at Surfaces

CEITEC authors:

• Pavel Procházka, Ph.D.