Application of correlative AFM/SEM microscopy

Master´s Thesis

Hegrová, V., 2019: Application of correlative AFM/SEM microscopy. MASTER´S THESIS , p. 1 - 64
(LITESCOPE-LYRA, MIRA-EBL, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER, LYRA)

Equipment:

• LiteScope 1.0 (LITESCOPE-LYRA)
• Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS (MIRA-EBL)
• RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80 (RIE-FLUORINE)
• Electron beam evaporator BESTEC (EVAPORATOR)
• Wire bonder TPT HB 16 (WIRE-BONDER)
• Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 (LYRA)

Research Groups:

• CF: CEITEC Nano
• Fabrication and Characterisation of Nanostructures