Correlation of Structure and EBIC Contrast from Threading Dislocations in AlN/Si Films

Vacek, P.; Kostelník, P.; Gröger, R., 2019: . PHYSICA STATUS SOLIDI B 256(11), p. 1900279-1 - 1900279-7, doi: 10.1002/pssb.201900279
(HELIOS, LYRA, ICON-SPM)

Equipment:

• Focused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 660 (HELIOS)
• Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 (LYRA)
• Scanning Probe Microscope Bruker Dimension Icon (ICON-SPM)

Research Groups:

• CF: CEITEC Nano
• Multiscale Modelling and Measurements of Physical Properties

CEITEC authors:

• Roman Gröger, Ph.D.