CEITEC Nano Research Infrastructure
Brno University of Technology
Purkyňova 123, 612 00 Brno
Czech Republic
+420 54114 9207
nano@ceitec.vutbr.cz
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Rapid Thermal Processing Annealsys AS-One 150 (RTP)
Guarantor:
Jan Prášek, Ph.D.
Instrument status:
Operational
The AS-One is a 6´ versatile RTP system that can be used for the development of rapid thermal annealing and rapid thermal CVD processes up 1300 °C. The system allows RTP in a vacuum, Ar inert atmosphere or thermal oxidation and nitridation, implant annealing, ohmic contact annealing, etc.
Photogallery
Specification
More specification can be found here:
https://www.annealsys.com/products/rtp-and-rtcvd/as-one.html
Documents
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