Rapid Thermal Processing Annealsys AS-One 150 (RTP)


Guarantor:
Jan Prášek, Ph.D.

Instrument status:
Operational Operational


The AS-One is a 6´ versatile RTP system that can be used for the development of rapid thermal annealing and rapid thermal CVD processes up 1300 °C. The system allows RTP in a vacuum, Ar inert atmosphere or thermal oxidation and nitridation, implant annealing, ohmic contact annealing, etc.

Photogallery

Specification

More specification can be found here:
https://www.annealsys.com/products/rtp-and-rtcvd/as-one.html

Documents

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