Rapid thermal annealing Xerion XREACT/1 250°C (XERION)


Rapid thermal annealing Xerion XREACT/1 250°C

Guarantor:
Filip Münz, Ph.D.

Instrument status:
Non Operational Non Operational, 2.3.2020 13:10, chamber broken/repair under investigation

Equipment placement:
CEITEC Nano - C1.36


rapid thermal processing system

Photogallery

Specification

24 halogen lamps

maximum temperature 1 250 °C

temperature gradient 200 °C/s

repeatability ±1.5 °C

controlled by pyrometer and thermocoupler

vacuum 1 × 10–5 Pa

sample size up to 4”

Documents

Here is place for your documents.