
Rapid thermal annealing Xerion XREACT/1 250°C (XERION)

Guarantor:
Filip Münz, Ph.D.
Instrument status:
Non Operational, 2.3.2020 13:10, chamber broken/repair under investigation
Equipment placement:
CEITEC Nano - C1.36
rapid thermal processing system
Photogallery
Specification
24 halogen lamps |
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maximum temperature 1 250 °C |
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temperature gradient 200 °C/s |
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repeatability ±1.5 °C |
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controlled by pyrometer and thermocoupler |
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vacuum 1 × 10–5 Pa |
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sample size up to 4” |
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Documents
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