Rapid thermal annealing Xerion XREACT/1 250°C (XERION)

Instrument status:
Non Operational, 2.3.2020 13:10, chamber broken/repair under investigation

Equipment placement:
CEITEC Nano - C1.36

rapid thermal processing system

24 halogen lamps	•
maximum temperature 1 250 °C	•
temperature gradient 200 °C/s	•
repeatability ±1.5 °C	•
controlled by pyrometer and thermocoupler	•
vacuum 1 × 10–5 Pa	•
sample size up to 4”	•

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