CEITEC Nano Research Infrastructure
Brno University of Technology
Purkyňova 123, 612 00 Brno
Czech Republic
+420 54114 9207
nano@ceitec.vutbr.cz
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Preparation of surfaces with diffusion barrier for studying initial phase of semiconductor nanowire growth
Andrýsek, M., 2016: . BACHELOR’S THESIS , p. 1 - 22
(VERIOS, ALD-FIJI, LYRA)
Equipment:
- High resolution Scanning Electron Microscope FEI Verios 460L (VERIOS)
- Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200 (ALD-FIJI)
- Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 (LYRA)
Research Groups: