Organosilicon coatings based on trimethylsilyl acetate monomer prepared using plasma of RF capacitively coupled glow discharge

Kelarová, Š., 2023: . PH.D. THESIS , p. 1 - 182; FULL TEXT
(WOOLLAM-MIR, FTIR, SIMS, KRATOS-XPS)

Equipment:

• MIR spectroscopic ellipsometer J. A. Woollam IR-VASE (WOOLLAM-MIR)
• Vacuum FTIR Vertex70v + microscope Hyperion 3000 KIT - polarizors (FTIR)
• Secondary Ion Mass Spectroscopy ION-TOF TOF.SIMS5 (SIMS)
• X-ray Photoelectron Spectroscopy Axis Supra (KRATOS-XPS)

Research Groups:

• CF: CEITEC Nano