Organosilicon coatings based on trimethylsilyl acetate monomer prepared using plasma of RF capacitively coupled glow discharge

Ph.D. Thesis

Kelarová, Š., 2023: Organosilicon coatings based on trimethylsilyl acetate monomer prepared using plasma of RF capacitively coupled glow discharge. PH.D. THESIS , p. 1 - 182; FULL TEXT
(WOOLLAM-MIR, FTIR, KRATOS-XPS, SIMS)

Equipment:

• MIR spectroscopic ellipsometer J. A. Woollam IR-VASE (WOOLLAM-MIR)
• Vacuum FTIR Vertex70v + microscope Hyperion 3000 KIT - polarizors (FTIR)
• X-ray Photoelectron Spectroscopy Axis Supra (KRATOS-XPS)
• Secondary Ion Mass Spectroscopy ION-TOF TOF.SIMS5 (SIMS)

Research Groups:

• CF: CEITEC Nano