New LiteScope in the lab

True correlative microscopy with LiteScope 2.5 and AFM-in-SEM technique

The LiteScope 2.5 is a new generation of “plug & play” atomic force microscope (AFM) that can be easily integrated into a scanning electron microscope (SEM) for correlative multimodal sample analysis. Besides the standard high-resolution AFM performance, the LiteScope provides 12 more techniques to evaluate the material’s mechanical, electrical and magnetic properties in combination with SEM imaging and navigation, EDX analysis and FIB surface modification.

The LiteScope 2.5 is equipped with the new controller unit NenoBox 2.0 and AI-empowered software NenoView resulting in the following updates:

• Added 2nd lock-in amplifier
• Two new measurements modes (Phase Imaging and Electrostatic Force Microscopy)
• Optimized user interface
• Adapted layouts with automated tuning functions for each technique
• AI data post-processing
• Open hardware for easy customization
• Possibility to connect external devices (x16 inputs/outputs)

There are three main AFM-in-SEM benefits:

1. In-situ sample characterization of sensitive samples avoiding their surface contamination/oxidation.
2. Correlative multimodal sample analysis combining topography, mechanical, electrical and magnetic measurements with SEM imaging, EDX analysis and FIB milling/modification.
3. Precise localization of the region of interest