Nanoscale terahertz conductivity and ultrafast dynamics of terahertz plasmons in periodic arrays of epitaxial graphene nanoribbons

Singh, A.; Němec, H.; Kunc, J.; Kužel, P., 2024: . PHYSICAL REVIEW RESEARCH 6(3), doi: 10.1103/PhysRevResearch.6.033063; FULL TEXT
(RAITH, RIE-FLUORINE)

Equipment:

• E-beam writer RAITH150 Two (RAITH)
• RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80 (RIE-FLUORINE)

Research Groups:

• CF: CEITEC Nano