Morphology study of ultra thin layers by XPS analysis of multiple peaks of a single element

Pokorný, D., 2019: . MASTER'S THESIS , p. 1 - 71
(WOOLLAM-VIS, ALD-FIJI, KRATOS-XPS)

Equipment:

• NIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE (WOOLLAM-VIS)
• Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200 (ALD-FIJI)
• X-ray Photoelectron Spectroscopy Axis Supra (KRATOS-XPS)

Research Groups:

• CF: CEITEC Nano
• Fabrication and Characterisation of Nanostructures

CEITEC authors:

• David Pokorný, Ph.D.