CEITEC Nano Research Infrastructure
Brno University of Technology
Purkyňova 123, 612 00 Brno
Czech Republic
+420 54114 9207
nano@ceitec.vutbr.cz
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Low pressure chemical vapor deposition - Nitrides (LPCVD-SiN)
Guarantor:
Filip Münz, Ph.D.
Instrument status:
Operational, 9.2.2018 16:44
Equipment placement:
CEITEC Nano - C1.34
Facilities and methods enabling nanolayer and single atom layer deposition, nanostructure preparation and fabrication of new devices and systems (electronic, photonic, electromechanical).
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