Low Energy Ion Scattering as a depth profiling tool for thin layers - Case of bromine Methanol etched CdTe

VACUUM

ŠIK, O.; BÁBOR, P.; POLČÁK, J.; BELAS, E.; MORAVEC, P.; GRMELA, L.; STANĚK, J., 2018: Low Energy Ion Scattering as a depth profiling tool for thin layers - Case of bromine Methanol etched CdTe. VACUUM 152, p. 138 - 7, doi: 10.1016/j.vacuum.2018.03.014; FULL TEXT
(UHV-LEIS, KRATOS-XPS)

Equipment:

• Ultra High Vacuum Preparation and Analytical System - Low Energy Ion Spectroscopy ION-TOF Qtac 100 (UHV-LEIS)
• X-ray Photoelectron Spectroscopy Axis Supra (KRATOS-XPS)

Research Groups:

• Fabrication and Characterisation of Nanostructures
• CF: CEITEC Nano
• Advanced Instrumentation and Methods for Materials Characterization

CEITEC authors:

• Ondřej Šik, Ph.D.
• Petr Bábor, Ph.D.
• Josef Polčák, Ph.D.