Investigation of hydrogen impurities in PE-ALD AlN thin films by IBA methods

Vacuum

Dallaev, R., 2021: Investigation of hydrogen impurities in PE-ALD AlN thin films by IBA methods. VACUUM 193, doi: 10.1016/j.vacuum.2021.110533; FULL TEXT
(ALD-FIJI, SIMS, ICON-SPM)

Equipment:

• Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200 (ALD-FIJI)
• Secondary Ion Mass Spectroscopy ION-TOF TOF.SIMS5 (SIMS)
• Scanning Probe Microscope Bruker Dimension Icon (ICON-SPM)

Research Groups:

• CF: CEITEC Nano