Insight into plasma polymerization with a significant contribution of etching to the deposition process

SURFACE & COATINGS TECHNOLOGY

JANŮŠOVÁ, M.; NEČAS, D.; NAVASCUES, P.; HEGEMANN, D.; GAVRANOVIĆ, S.; ZAJÍČKOVÁ, L., 2025: Insight into plasma polymerization with a significant contribution of etching to the deposition process. SURFACE & COATINGS TECHNOLOGY 503, doi: 10.1016/j.surfcoat.2025.131962; FULL TEXT
(KRATOS-XPS, DEKTAK, WOOLLAM-VIS)

Equipment:

• X-ray Photoelectron Spectroscopy Axis Supra (KRATOS-XPS)
• Mechanical profilometer Bruker Dektak XT (DEKTAK)
• NIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE (WOOLLAM-VIS)

Research Groups:

• Plasma Technologies
• CF: CEITEC Nano

CEITEC authors:

• Martina Janůšová
• David Nečas, Ph.D.
• Lenka Zajíčková, Ph.D.