In situ observation of carbon nanotube layer growth on microbolometers with substrates at ambient temperature

SVATOŠ, V.; GABLECH, I.; ILIC, B; PEKÁREK, J.; NEUŽIL, P., 2018: . JOURNAL OF APPLIED PHYSICS 123(11), p. 114503-1 - 8, doi: 10.1063/1.5016465; FULL TEXT
(EVAPORATOR, DIENER)

Equipment:

• Electron beam evaporator BESTEC (EVAPORATOR)
• Resist stripper Diener electronic NANO Plasma cleaner (DIENER)

Research Groups:

• CF: CEITEC Nano

CEITEC authors:

• Prof. Pavel Neužil
• Imrich Gablech, Ph.D.