Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques

JOURNAL OF VISUALIZED EXPERIMENTS : JOVE

DHANKHAR, M.; VAŇATKA, M.; URBÁNEK, M., 2018: Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques. JOURNAL OF VISUALIZED EXPERIMENTS : JOVE (137), p. 1 - 7, doi: 10.3791/57817; FULL TEXT
(MIRA-EBL, EVAPORATOR, TITAN, KAUFMAN)

Equipment:

• Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS (MIRA-EBL)
• Electron beam evaporator BESTEC (EVAPORATOR)
• High-resolution (scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed (TITAN)
• Ion-Beam Sputter Deposition System BESTEC (KAUFMAN)

Research Groups:

• Fabrication and Characterisation of Nanostructures
• CF: CEITEC Nano

CEITEC authors:

• Michal Urbánek, Ph.D.