Evaluation of Different Dielectrics For Mid-Infrared Waveguides

Konečný, A., 2019: . BACHELOR'S THESIS , p. 1 - 32; FULL TEXT
(MAGNETRON, PECVD, ALD-FIJI, WOOLLAM-MIR)

Equipment:

• Magnetron sputtering system BESTEC (MAGNETRON)
• Plasma Enhanced CVD of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 100 (PECVD)
• Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200 (ALD-FIJI)
• MIR spectroscopic ellipsometer J. A. Woollam IR-VASE (WOOLLAM-MIR)

Research Groups:

• CF: CEITEC Nano