Elevating Platinum to Volumetric Capacitance: High Surface Area Electrodes through Reactive Pt Sputtering

ADVANCED HEALTHCARE MATERIALS

GRYSZEL, M.; JAKEŠOVÁ, M.; VU, X.; INGEBRANDT, S.; GLOWACKI, E., 2024: Elevating Platinum to Volumetric Capacitance: High Surface Area Electrodes through Reactive Pt Sputtering. ADVANCED HEALTHCARE MATERIALS , doi: 10.1002/adhm.202302400; FULL TEXT
(EVAPORATOR, DEKTAK, RIE-FLUORINE, DWL, SUSS-MA8)

Equipment:

• Electron beam evaporator BESTEC (EVAPORATOR)
• Mechanical profilometer Bruker Dektak XT (DEKTAK)
• RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80 (RIE-FLUORINE)
• UV Direct Write Laser system Heidelberg Instruments DWL 66-fs (DWL)
• Mask Aligner, NanoImprint Lithography SÜSS MicroTec MA8/BA8 Gen3 (SUSS-MA8)

Research Groups:

• Bioelectronics Materials and Devices
• CF: CEITEC Nano

CEITEC authors:

• Marie Jakešová, Ph.D.
• Prof. Eric Daniel Glowacki, Ph.D.