Electron Energy-Loss Spectroscopy Method for Thin-Film Thickness Calculations with a Low Incident Energy Electron Beam

Technologies

Jaber, A. M. D.; Alsoud, A.; Al-Bashaish, S. R.; Al Dmour, H.; Mousa, M. S.; Trčka, T.; Holcman, V.; Sobola, D., 2024: Electron Energy-Loss Spectroscopy Method for Thin-Film Thickness Calculations with a Low Incident Energy Electron Beam. TECHNOLOGIES 12(6), doi: 10.3390/technologies12060087; FULL TEXT

Research Groups:

• Advanced Ceramic Materials
• CF: CEITEC Nano

CEITEC authors:

• Dinara Sobola, Ph.D.