Electron Energy-Loss Spectroscopy Method for Thin-Film Thickness Calculations with a Low Incident Energy Electron Beam

Technologies

Jaber, A. M. D.; Alsoud, A.; Al-Bashaish, S. R.; Al Dmour, H.; Mousa, M. S.; Trčka, T.; Holcman, V.; Sobola, D., 2024: Electron Energy-Loss Spectroscopy Method for Thin-Film Thickness Calculations with a Low Incident Energy Electron Beam. TECHNOLOGIES 12(6), doi: 10.3390/technologies12060087; FULL TEXT

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