Electric field and higher harmonics of RF plasma slit jet measured by antennas and VI probes

PLASMA SOURCES SCIENCE & TECHNOLOGY

POLÁŠKOVÁ, K.; DREXLER, P.; KLÍMA, M.; MACHÁČ, J.; NEČAS, D.; ŠVANDA, M.; ZAJÍČKOVÁ, L., 2024: Electric field and higher harmonics of RF plasma slit jet measured by antennas and VI probes. PLASMA SOURCES SCIENCE & TECHNOLOGY 33(5), p. 1 - 16, doi: 10.1088/1361-6595/ad48b5; FULL TEXT

Research Groups:

• Plasma Technologies
• CF: CEITEC Nano

CEITEC authors:

• Kateřina Polášková, Ph.D.
• David Nečas, Ph.D.
• Lenka Zajíčková, Ph.D.