Development and fabrication of microelectromechanical systems MEMS

Bachelor´s thesis

Koňařík, L., 2024: Development and fabrication of microelectromechanical systems MEMS. BACHELOR´S THESIS , p. 1 - 46; FULL TEXT
(LASER-DICER, DWL, EVAPORATOR, RIE-FLUORINE, DRIE, NANOCALC, DEKTAK, WIRE-BONDER, LYRA)

Equipment:

• Laser dicer Oxford Lasers A-Series (LASER-DICER)
• UV Direct Write Laser system Heidelberg Instruments DWL 66-fs (DWL)
• Electron beam evaporator BESTEC (EVAPORATOR)
• RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80 (RIE-FLUORINE)
• Deep reactive ion etching of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 100 (DRIE)
• Spectroscopic reflectometer Ocean Optics NanoCalc 2000 (NANOCALC)
• Mechanical profilometer Bruker Dektak XT (DEKTAK)
• Wire bonder TPT HB 16 (WIRE-BONDER)
• Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 (LYRA)

Research Groups:

• CF: CEITEC Nano