Design and fabrication of dielectric metasurfaces for ultraviolet wavelengths

Idesová, B., 2023: . MASTER'S THESIS , p. 1 - 71; FULL TEXT
(EVAPORATOR, ALD-FIJI, RAITH, NANOCALC, SCIA)

Equipment:

• Electron beam evaporator BESTEC (EVAPORATOR)
• Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200 (ALD-FIJI)
• E-beam writer RAITH150 Two (RAITH)
• Spectroscopic reflectometer Ocean Optics NanoCalc 2000 (NANOCALC)
• Ion beam etching Scia Systems Coat 200 (SCIA)

Research Groups:

• CF: CEITEC Nano

CEITEC authors:

• Beáta Idesová