Deposition penetration depth and sticking probability in plasma polymerization of cyclopropylamine

APPLIED SURFACE SCIENCE

MICHLÍČEK, M.; BLAHOVÁ, L.; DVOŘÁKOVÁ, E.; NEČAS, D.; ZAJÍČKOVÁ, L., 2021: Deposition penetration depth and sticking probability in plasma polymerization of cyclopropylamine. APPLIED SURFACE SCIENCE 540, p. 1 - 10, doi: 10.1016/j.apsusc.2020.147979; FULL TEXT
(WOOLLAM-VIS, FTIR, KRATOS-XPS, LYRA, R4-EXPERIMENTAL-PECVD)

Equipment:

• NIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE (WOOLLAM-VIS)
• Vacuum FTIR Vertex70v + microscope Hyperion 3000 KIT - polarizors (FTIR)
• X-ray Photoelectron Spectroscopy Axis Supra (KRATOS-XPS)
• Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 (LYRA)
• Experimental PECVD: ion and mass analyzer, optical emission spectroscopy (R4-EXPERIMENTAL-PECVD)

Research Groups:

• CF: CEITEC Nano
• Plasma Technologies

CEITEC authors:

• Lenka Zajíčková, Ph.D.
• Miroslav Michlíček, Ph.D.
• David Nečas, Ph.D.
• Lucie Janů, Ph.D.