Defect localization and analysis in GaN

Master´s Thesis

Gazdík, R., 2024: Defect localization and analysis in GaN. MASTER´S THESIS , p. 1 - 66; FULL TEXT
(MIRA-STAN, HELIOS, TITAN)

Equipment:

• Scanning electron microscope (SEM) MIRA3 XMU (MIRA-STAN)
• Focused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 660 (HELIOS)
• High-resolution (scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed (TITAN)

Research Groups:

• CF: CEITEC Nano