Compact vacuum setup for laser induced plasma etching with optical emission spectrum monitoring

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

SILHAN, L.; ARREGI URIBEETXEBARRIA, J.; PLICHTA, T.; VACULIK, O.; NOVOTNY, J.; SERY, M., 2025: Compact vacuum setup for laser induced plasma etching with optical emission spectrum monitoring. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 43(3), doi: 10.1116/6.0004296; FULL TEXT
(ULTRAFAST-LASER)

Equipment:

• ULTRAFAST Laser Setup (ULTRAFAST-LASER)

Research Groups:

• Nanomagnetism and Spintronics
• CF: CEITEC Nano

CEITEC authors:

• Jon Ander Arregi Uribeetxebarria, Ph.D.