Compact vacuum setup for laser induced plasma etching with optical emission spectrum monitoring

Journal of Vacuum Science & Technology B

Šilhan, L.; Arregi, J. A.; Plichta, T.; Vaculík, O.; Novotný, J.; Šerý, M., 2025: Compact vacuum setup for laser induced plasma etching with optical emission spectrum monitoring. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 43(3), doi: 10.1116/6.0004296; FULL TEXT
(ULTRAFAST-LASER)

Equipment:

• ULTRAFAST Laser Setup (ULTRAFAST-LASER)

Research Groups:

• Nanomagnetism and Spintronics
• CF: CEITEC Nano

CEITEC authors:

• Jon Ander Arregi Uribeetxebarria, Ph.D.