Combined detector for visible and infrared radiation

Master´s Thesis

Děcký, M., 2025: Combined detector for visible and infrared radiation. MASTER´S THESIS , p. 1 - 63; FULL TEXT
(MIRA-EBL, SUSS-MA8, DEKTAK, NANOCALC, MAGNETRON, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER, MPS150, LYRA, LASER-DICER)

Equipment:

• Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS (MIRA-EBL)
• Mask Aligner, NanoImprint Lithography SÜSS MicroTec MA8/BA8 Gen3 (SUSS-MA8)
• Mechanical profilometer Bruker Dektak XT (DEKTAK)
• Spectroscopic reflectometer Ocean Optics NanoCalc 2000 (NANOCALC)
• Magnetron sputtering system BESTEC (MAGNETRON)
• RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80 (RIE-FLUORINE)
• Electron beam evaporator BESTEC (EVAPORATOR)
• Wire bonder TPT HB 16 (WIRE-BONDER)
• 4-probe station Cascade Microtech MPS 150 (MPS150)
• Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 (LYRA)
• Laser dicer Oxford Lasers A-Series (LASER-DICER)

Research Groups:

• Fabrication and Characterisation of Nanostructures
• CF: CEITEC Nano