Stress-free deposition of [001] preferentially oriented titanium thin film by Kaufman ion-beam source

THIN SOLID FILMS

GABLECH, I.; CAHA, O.; SVATOŠ, V.; PEKÁREK, J.; NEUŽIL, P.; ŠIKOLA, T., 2017: Stress-free deposition of [001] preferentially oriented titanium thin film by Kaufman ion-beam source. THIN SOLID FILMS 638, p. 57 - 6, doi: 10.1016/j.tsf.2017.07.039; FULL TEXT
(KAUFMAN, RIGAKU9, ICON-SPM)

Equipment:

• Ion-Beam Sputter Deposition System BESTEC (KAUFMAN)
• X-ray diffractometer with high brightness source Rigaku SmartLab 9kW (RIGAKU9)
• Scanning Probe Microscope Bruker Dimension Icon (ICON-SPM)

Research Groups:

• Fabrication and Characterisation of Nanostructures
• CF: CEITEC Nano

CEITEC authors:

• Prof. Pavel Neužil
• Prof. Tomáš Šikola
• Ondřej Caha, Ph.D.
• Imrich Gablech, Ph.D.