Simple and Efficient AlN-Based Piezoelectric Energy Harvesters

Micromachines

Gablech, I.; Klempa, J.; Pekárek, J.; Vyroubal, P.; Hrabina, J.; Holá, M.; Kunz, J.; Brodský, J.; Neužil, P., 2020: Simple and Efficient AlN-Based Piezoelectric Energy Harvesters. MICROMACHINES 11(2), p. 143-1 - 143-10, doi: 10.3390/mi11020143
(DRIE, RIE-CHLORINE, WIRE-BONDER, KAUFMAN)

Equipment:

Research Groups:

CEITEC authors: