Fabrication, optimization and in-situ characterization of thermally tunable vanadium dioxide nanostructures

Master´s Thesis

Krpenský, J., 2022: Fabrication, optimization and in-situ characterization of thermally tunable vanadium dioxide nanostructures. MASTER´S THESIS ; FULL TEXT
(EVAPORATOR, UHV-PREPARATION, VERIOS, TITAN, LYRA)

Equipment:

• Electron beam evaporator BESTEC (EVAPORATOR)
• Ultra High Vacuum Preparation and Analytical System - Preparation Chamber SPECS (UHV-PREPARATION)
• High resolution Scanning Electron Microscope FEI Verios 460L (VERIOS)
• High-resolution (scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed (TITAN)
• Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 (LYRA)

Research Groups:

• CF: CEITEC Nano