Surface contamination of optical elements studied by Low Energy Ion Scattering LEIS

Bachelor´s thesis

Sekula, F., 2019: Surface contamination of optical elements studied by Low Energy Ion Scattering LEIS. BACHELOR´S THESIS ; FULL TEXT
(UHV-LEIS)

Equipment:

• Ultra High Vacuum Preparation and Analytical System - Low Energy Ion Spectroscopy ION-TOF Qtac 100 (UHV-LEIS)

Research Groups:

• Fabrication and Characterisation of Nanostructures
• CF: CEITEC Nano