Analysis and characterisation of spirally–arranged field–emission nanostructure

Bachelor´s thesis

Ondříšková, M., 2022: Analysis and characterisation of spirally–arranged field–emission nanostructure. BACHELOR´S THESIS , p. 1 - 56; FULL TEXT
(VERIOS, DRIE, KRATOS-XPS)

Equipment:

• High resolution Scanning Electron Microscope FEI Verios 460L (VERIOS)
• Deep reactive ion etching of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 100 (DRIE)
• X-ray Photoelectron Spectroscopy Axis Supra (KRATOS-XPS)

Research Groups:

• CF: CEITEC Nano