Design and fabrication of tunable dielectric metasurfaces for visible and infrared wavelengths

Master´s Thesis

Kepič, P., 2021: Design and fabrication of tunable dielectric metasurfaces for visible and infrared wavelengths. MASTER´S THESIS , p. 1 - 76; FULL TEXT
(MIRA-EBL, EVAPORATOR, DEKTAK, WITEC-RAMAN, KRATOS-XPS, SNOM-NANONICS, LYRA, ICON-SPM)

Equipment:

• Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS (MIRA-EBL)
• Electron beam evaporator BESTEC (EVAPORATOR)
• Mechanical profilometer Bruker Dektak XT (DEKTAK)
• Witec Alpha 300R (WITEC-RAMAN)
• X-ray Photoelectron Spectroscopy Axis Supra (KRATOS-XPS)
• Scanning Near-field Optical Microscopy Nanonics Imaging MV 4000 (SNOM-NANONICS)
• Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 (LYRA)
• Scanning Probe Microscope Bruker Dimension Icon (ICON-SPM)

Research Groups:

• CF: CEITEC Nano

CEITEC authors:

• Peter Kepič