Preparation of [001] oriented titanium thin film for MEMS applications by Kaufman ion-beam source

9TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION (NANOCON 2017)

Gablech, I.; Caha, O.; Svatos, V.; Prasek, J.; Pekarek, J.; Neuzil, P.; Sikola, T., 2018: Preparation of [001] oriented titanium thin film for MEMS applications by Kaufman ion-beam source. 9TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION (NANOCON 2017) , p. 117 - 122
(KAUFMAN, RIGAKU9)

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